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1

Study of contacts in an electrostatically actuated microswitch

Sumit Majumder, N.E. McGruer, George G. Adams, P.M. Zavracky, Richard H. Morrison, Jacqueline Krim

Journal:

Sensors and Actuators A: Physical

Year:

2001

Language:

english

File:

PDF, 294 KB

english, 2001

2

Integrated self-biased hexaferrite microstrip circulators for millimeter-wavelength applications

Oliver, S.A., Shi, P., McGruer, N.E., Vittoria, C., Hu, W., How, H., McKnight, S.W., Zavracky, P.M.

Journal:

IEEE Transactions on Microwave Theory and Techniques

Year:

2001

Language:

english

File:

PDF, 82 KB

english, 2001

3

[IEEE 1997 IEEE International Magnetics Conference (INTERMAG'97) - New Orleans, LA, USA (1-4 April 1997)] 1997 IEEE International Magnetics Conference (INTERMAG'97) - A Monolithically Integrated Single-Crystal Yttrium Iron Garnet/ Silicon X-Band Circulator

Oliver, S.A., Zavracky, P.M., McGruer, N.E., Schmidt, R.

Year:

1997

Language:

english

File:

PDF, 101 KB

english, 1997

4

Thermal expansion coefficient of polycrystalline silicon and silicon dioxide thin films at high temperatures

Tada, Haruna, Kumpel, Amy E., Lathrop, Richard E., Slanina, John B., Nieva, Patricia, Zavracky, Paul, Miaoulis, Ioannis N., Wong, Peter Y.

Journal:

Journal of Applied Physics

Year:

2000

Language:

english

File:

PDF, 490 KB

english, 2000

5

Micromechanical switches fabricated using nickel surface micromachining

Zavracky, P.M., Majumder, S., McGruer, N.E.

Journal:

Journal of Microelectromechanical Systems

Year:

1997

Language:

english

File:

PDF, 202 KB

english, 1997

6

Theory and experiment of thin-film junction circulator

How, H., Oliver, S.A., McKnight, S.W., Zavracky, P.M., McGruer, N.E., Vittoria, C., Schmidt, R.

Journal:

IEEE Transactions on Microwave Theory and Techniques

Year:

1998

Language:

english

File:

PDF, 253 KB

english, 1998

7

Rothko: a three-dimensional FPGA

Leeser, M., Meleis, W.M., Vai, M.M., Chiricescu, S., Weidong Xu,, Zavracky, P.M.

Journal:

IEEE Design & Test of Computers

Year:

1998

Language:

english

File:

PDF, 243 KB

english, 1998

8

Strain analysis of silicon-on-insulator films produced by zone melting recrystallization

Zavracky, P.M., Adams, G.G., Aquilino, P.D.

Journal:

Journal of Microelectromechanical Systems

Year:

1995

Language:

english

File:

PDF, 706 KB

english, 1995

9

Selective black absorbers using MgO/Au cermet films

Fan, John C. C., Zavracky, Paul M.

Journal:

Applied Physics Letters

Year:

1976

Language:

english

File:

PDF, 494 KB

english, 1976

10

Theoretical modeling of microstrip thin-film circulators

How, H., Oliver, S.A., McKnight, S.W., Zavracky, P.M., McGruer, N.E., Vittoria, C.

Journal:

IEEE Transactions on Magnetics

Year:

1997

Language:

english

File:

PDF, 347 KB

english, 1997

11

Fabrication of Integrated Ferrite/Semiconductor Circulators

Oliver, S. A., How, H., Shi, P., Hu, W., Kozulin, I., McGruer, N. E., Zavracky, P. M., Vittoria, C.

Journal:

MRS Proceedings

Year:

1998

Language:

english

File:

PDF, 1.66 MB

english, 1998

12

Microswitches and microrelays with a view toward microwave applications

Paul M. Zavracky, Nicol E. McGruer, Richard H. Morrison, David Potter

Journal:

International Journal of RF and Microwave Computer-Aided Engineering

Year:

1999

Language:

english

File:

PDF, 358 KB

english, 1999

13

VLSI design in the 3rd dimension

Stephen Strickland, Erhan Ergin, David R. Kaeli, Paul Zavracky

Journal:

Integration, the VLSI Journal

Year:

1998

Language:

english

File:

PDF, 309 KB

english, 1998

14

A new process for the fabrication of miniature Fabry Perot spectrometers

Paul M. Zavracky, Erwin Hennenberg, Kevin Denis, Huikai Xi

Journal:

Year:

1998

Language:

english

File:

PDF, 4.63 MB

english, 1998

15

Materials study of silicon-on-lnsulator material by TEM

E. P. Kvam, J. Washburn, L. P. Allen, P. M. Zavracky

Journal:

Journal of Electronic Materials

Year:

1991

Language:

english

File:

PDF, 492 KB

english, 1991

16

Creating 3D circuits using transferred films

Sailer, P.M., Singhal, P., Hopwood, J., Kaeli, D.R., Zavracky, P.M., Warner, K., Vu, D.P.

Journal:

IEEE Circuits and Devices Magazine

Year:

1997

Language:

english

File:

PDF, 543 KB

english, 1997

17

Influence of nonuniform magnetic field on a ferrite junction circulator

How, H., Oliver, S.A., McKnight, S.W., Zavracky, P.M., McGruer, N.E., Vittoria, C., Schmidt, R.

Journal:

IEEE Transactions on Microwave Theory and Techniques

Year:

1999

Language:

english

File:

PDF, 266 KB

english, 1999

18

Optical approaches to incorporation of displays within eyeglasses

M. B. Spitzer, P. D. Aquilino, R. W. McClelland, M. H. Olson, N. M. Rensing, C. A. DiMarzio, P. M. Zavracky, A. Lemoncelli, J. Hilliar

Journal:

Journal of the Society for Information Display

Year:

1998

File:

PDF, 962 KB

1998

19

[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - Measurement and modelling of surface micromachined, electrostatically actuated microswitches

Majumder, S., McGruer, N.E., Zavracky, P.M., Adams, G.G., Morrison, R.H., Krim, J.

Year:

1997

Language:

english

File:

PDF, 558 KB

english, 1997

20

Design and process considerations for a tunneling tip accelerometer

Zavracky, Paul M, McClelland, Bob, Warner, Keith, Wang, Jianchao, Hartley, Frank, Dolgin, Ben

Journal:

Journal of Micromechanics and Microengineering

Year:

1996

Language:

english

File:

PDF, 732 KB

english, 1996

21

Multichannel Microchip Electrospray Mass Spectrometry

Xue, Qifeng, Foret, Frantisek, Dunayevskiy, Yuriy M., Zavracky, Paul M., McGruer, Nicol E., Karger, Barry L.

Journal:

Analytical Chemistry

Year:

1997

Language:

english

File:

PDF, 126 KB

english, 1997

22

[IEEE Sixth International Symposium on Wearable Computers (ISWC 2002) - Seattle, WA, USA (7-10 Oct. 2002)] Proceedings. Sixth International Symposium on Wearable Computers, - Threat response: a compelling application for wearable computing

Rensing, N.M., Weststrate, E., Zavracky, P.M., Chandler, M., Nobel, K.R., Helfter, S., Kinsky, M., Gold, M., Martin, B.

Year:

2002

Language:

english

File:

PDF, 412 KB

english, 2002

23

[IEEE 1990 IEEE SOS/SOI Technology Conference. - Key West, FL, USA (2-4 Oct. 1990)] 1990 IEEE SOS/SOI Technology Conference. Proceedings - Recombination lifetime measurements in SOI materials using a depletion-mode MOSFET

Vu, D.P., Henderson, W.R., Zavracky, P.M., Cheong, N.K.

Year:

1990

Language:

english

File:

PDF, 100 KB

english, 1990

24

A monolithic single-crystal yttrium iron garnet/silicon X-band circulator

Oliver, S.A., Zavracky, P.M., McGruer, N.E., Schmidt, R.

Journal:

IEEE Microwave and Guided Wave Letters

Year:

1997

Language:

english

File:

PDF, 41 KB

english, 1997

25

A simple electrical method to determine the Si and oxide thicknesses in SOI materials

Vu, D.-P., Zavracky, P.M., Boden, M.J., Cheong, N.K.

Journal:

IEEE Electron Device Letters

Year:

1991

Language:

english

File:

PDF, 214 KB

english, 1991

26

Novel imaging system for measuring microscale curvatures at high temperatures

Tada, Haruna, Kumpel, Amy E., Lathrop, Richard E., Slanina, John B., Nieva, Patricia, Zavracky, Paul, Miaoulis, Ioannis N., Wong, Peter Y.

Journal:

Review of Scientific Instruments

Year:

2000

Language:

english

File:

PDF, 874 KB

english, 2000

27

[IEEE IEEE SOS/SOI Technology Conference - Stateline, NV, USA (3-5 Oct. 1989)] IEEE SOS/SOI Technology Conference - Examination of impurities in ISE SOI material

Knapp, J., Allen, L.P., Zavracky, P.M.

Year:

1989

Language:

english

File:

PDF, 71 KB

english, 1989

28

[IEEE WESCON'95 - San Francisco, CA, USA (7-9 Nov. 1995)] Proceedings of WESCON'95 - Miniature Fabry Perot spectrometers using micromachining technology

Zavracky, P.M., Hennenberg, E.

Year:

1995

Language:

english

File:

PDF, 696 KB

english, 1995

29

[IEEE 1990 IEEE SOS/SOI Technology Conference. - Key West, FL, USA (2-4 Oct. 1990)] 1990 IEEE SOS/SOI Technology Conference. Proceedings - Advances in recrystallization technology

Zavracky, P.M., Allen, L., Vu, D.P., Batty, M.

Year:

1990

Language:

english

File:

PDF, 111 KB

english, 1990

30

[IEEE Comput. Soc Seventeenth Conference on Advanced Research in VLSI - Ann Arbor, MI, USA (15-16 Sept. 1997)] Proceedings Seventeenth Conference on Advanced Research in VLSI - Architectural design of a three dimensional FPGA

Meleis, W.M., Leeser, M., Zavracky, P., Vai, M.M.

Year:

1997

Language:

english

File:

PDF, 797 KB

english, 1997

31

[IEEE IEEE SOS/SOI Technology Conference - Stateline, NV, USA (3-5 Oct. 1989)] IEEE SOS/SOI Technology Conference - High temperature operation of ISE devices and circuits

Vu, D.P., Boden, M.J., Henderson, W.R., Cheong, N.K., Zavracky, P.M., Adams, D.A., Austin, M.M.

Year:

1989

Language:

english

File:

PDF, 92 KB

english, 1989

32

[IEEE Electrical Contacts - 1998. Forty-Fourth IEEE Holm Conference on Electrical Contacts - Arlington, VA, USA (26-28 Oct. 1998)] Electrical Contacts - 1998. Proceedings of the Forty-Fourth IEEE Holm Conference on Electrical Contacts (Cat. No.98CB36238) - Study of contacts in an electrostatically actuated microswitch

Majumder, S., McGruer, N.E., Adams, G.G., Zavracky, A., Zavracky, P.M., Morrison, R.H., Krim, J.

Year:

1998

Language:

english

File:

PDF, 562 KB

english, 1998

33

Monolithic integration of a light-emitting diode array and a silicon circuit using transfer processes

B. D. Dingle, M. B. Spitzer, R. W. Mcclelland, J. C. C. Fan, P. M. Zavracky

Year:

1993

Language:

english

File:

PDF, 628 KB

english, 1993

34

[IEEE Conference Record of the Twentieth IEEE Photovoltaic Specialists Conference - Las Vegas, NV, USA (26-30 Sept. 1988)] Conference Record of the Twentieth IEEE Photovoltaic Specialists Conference - Gallium arsenide concentrator solar cells with highly stable metallization

Spitzer, M.B., Dingle, J.E., Gale, R.P., Zavracky, P., Boden, M., Doyle, D.H.

Year:

1988

Language:

english

File:

PDF, 303 KB

english, 1988

35

Thin-film VO2 submillimeter-wave modulators and polarizers

Fan, John C. C., Fetterman, Harold R., Bachner, Frank J., Zavracky, Paul M., Parker, Christopher D.

Journal:

Applied Physics Letters

Year:

1977

Language:

english

File:

PDF, 500 KB

english, 1977

36

[IEEE 1997 IEEE International Magnetics Conference (INTERMAG'97) - New Orleans, LA, USA (1-4 April 1997)] 1997 IEEE International Magnetics Conference (INTERMAG'97) - Theoretical Modeling of Microstrip Thin-Film Circulators

How, H., McKnight, S.W., Oliver, S.A., Zavracky, P.M., McGruer, N.E., Vittoria, C.

Year:

1997

Language:

english

File:

PDF, 113 KB

english, 1997

37

[IEEE Proceedings. SOS/SOI Technology Workshop - St. Simons Island, GA, USA (3-5 Oct. 1988)] Proceedings. SOS/SOI Technology Workshop - High quality SOI material produced using isolated silicon epitaxy

Zavracky, P., Vu, D.P., Allen, L., Henderson, W., Batty, M., Jersey, T.

Year:

1988

Language:

english

File:

PDF, 85 KB

english, 1988

38

Fabrication of Vertical Sidewalls by Anisotropic Etching of Silicon (100) Wafers

Zavracky, Paul M.

Journal:

Journal of The Electrochemical Society

Year:

1994

Language:

english

File:

PDF, 1.96 MB

english, 1994

39

SPIE Proceedings [SPIE Aerospace/Defense Sensing and Controls - Orlando, FL (Monday 13 April 1998)] Helmet- and Head-Mounted Displays III - Architecture for low-power real-time image analysis using 3D silicon technology

McIlrath, Lisa A., Zavracky, Paul M., Lewandowski, Ronald J., Haworth, Loran A., Girolamo, Henry J.

Year:

1998

Language:

english

File:

PDF, 3.48 MB

english, 1998

40

SPIE Proceedings [SPIE Micromachining and Microfabrication - Austin, TX (Monday 23 October 1995)] Micromachining and Microfabrication Process Technology - Patterned eutectic bonding with Al/Ge thin films for MEMS

Zavracky, Paul M., Vu, Bao, Markus, Karen W.

Year:

1995

Language:

english

File:

PDF, 753 KB

english, 1995

41

Effect of doping level during rapid thermal processing of multilayer structures

Abramson, A. R., Nieva, P., Tada, H., Zavracky, P., Miaoulis, I. N., Wong, P. Y.

Journal:

Journal of Materials Research

Year:

1999

Language:

english

File:

PDF, 308 KB

english, 1999

42

Piezoresistivity of silicon-on-insulator films by zone-melting recrystallization

Zavracky, P M, Warner, K, Lassic, I, Green, J

Journal:

Journal of Micromechanics and Microengineering

Year:

1993

Language:

english

File:

PDF, 577 KB

english, 1993

43

[IEEE International Solid State Sensors and Actuators Conference (Transducers '97) - Chicago, IL, USA (16-19 June 1997)] Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97) - Study of tunneling noise using surface micromachined tunneling tip devices

Jianchao Wang,, Zavracky, P.M., McGruer, N.E., Morrison, R.H.

Year:

1997

Language:

english

File:

PDF, 564 KB

english, 1997

44

Large Diameter Soi Wafers by Zone-Melting-Recrystallization

Zavracky, P. M., Vu, D. P., Allen, L., Henderson, W., Guckel, H., Sniegowski, J. J., Ford, T. P., Fan, J. C. C.

Journal:

MRS Proceedings

Year:

1987

Language:

english

File:

PDF, 756 KB

english, 1987

45

Crystallinity of Isolated Silicon Epitaxy (ISE) Silicon-on-Insulator Layers

Allen, L.T.P., Zavracky, P.M., Vu, D.P., Batty, M.W., Henderson, W.R., Boden, T.J., Bowen, D.K., Gorden-Smith, D., Thomas, C.R., Tjahjadi, T.

Journal:

MRS Proceedings

Year:

1989

Language:

english

File:

PDF, 1.16 MB

english, 1989

46

Optical Effects Induced by the Multilayer Nature of SOI Films During Transient Thermal Processing with a Radiant Line Heat Source.

Wong, Peter Y., Miaoulis, Ioannis N., Zavracky, P.

Journal:

MRS Proceedings

Year:

1990

Language:

english

File:

PDF, 1.12 MB

english, 1990

47

Mems as Temperature Sensors During High Temperature Processing

Tada, H., Abramson, A. R., Nieva, P., Zavracky, P., Miaoulis, I. N., Wong, P. Y.

Journal:

MRS Proceedings

Year:

1998

Language:

english

File:

PDF, 2.20 MB

english, 1998

48

Partial Transparency Effects of Silicon During Rapid Thermal Processing

Abramson, A. R., Tadal, H., Nieva, P., Zavracky, P., Miaoulis, I. N., Wong, P. Y.

Journal:

MRS Proceedings

Year:

1998

Language:

english

File:

PDF, 415 KB

english, 1998

49

Determining the High-temperature Properties of Thin Films Using Bilayered Cantilevers

Tada, H., Nieva, P., Zavracky, P., Miaoulis, I.N., Wong, P.Y.

Journal:

MRS Proceedings

Year:

1998

Language:

english

File:

PDF, 847 KB

english, 1998

50

Mechanical and Thermophysical Properties of Silicon Nitride Thin Films at High Temperatures Using In-Situ Mems Temperature Sensors

Nieva, Patricia, Tada, Haruna, Zavracky, Paul, Adams, George, Miaoulis, Ioannis, Wong, Peter

Journal:

MRS Proceedings

Year:

1998

Language:

english

File:

PDF, 2.66 MB

english, 1998